Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11786946 | Cleaning method and film forming apparatus | Sung Duk SON, Akinobu Kakimoto | 2023-10-17 |
| 11725281 | Gas introduction structure, thermal processing apparatus and gas supply method | Sung Duk SON, Masayuki Kitamura, Satoru Ogawa | 2023-08-15 |