Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11725281 | Gas introduction structure, thermal processing apparatus and gas supply method | Shingo Hishiya, Sung Duk SON, Masayuki Kitamura | 2023-08-15 |
| 11652197 | Method for producing an electronic device | Masafumi Kuramoto, Katsuaki Suganuma, Keun Soo Kim | 2023-05-16 |