Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11786946 | Cleaning method and film forming apparatus | Sung Duk SON, Shingo Hishiya | 2023-10-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11786946 | Cleaning method and film forming apparatus | Sung Duk SON, Shingo Hishiya | 2023-10-17 |