Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764506 | Connector and connector pair | Toshitaka Kubo, Kazuhiko Seki, Kazuto Hatakeyama, Kenji Koga, Tetsuo Shimizu +2 more | 2023-09-19 |
| 11732357 | Substrate processing method and substrate processing apparatus | Tsuyoshi Takahashi, Yasushi Fujii, Yu Nunoshige, Shinji Kawasaki, Hirotaka Kuwada +1 more | 2023-08-22 |
| 11651671 | Motion evaluation system, motion evaluation device, and motion evaluation method | Takuto Sato, Takehiro NIIKURA, Hiroki Ohashi, Takayuki Akiyama, Katsuyuki Nakamura +2 more | 2023-05-16 |
| 11600490 | Silicon film forming method and substrate processing apparatus | Tatsuya MIYAHARA, Keisuke Fujita | 2023-03-07 |
| 11551933 | Substrate processing method and substrate processing apparatus | Yasushi Fujii | 2023-01-10 |