Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732357 | Substrate processing method and substrate processing apparatus | Tsuyoshi Takahashi, Mitsuhiro Okada, Yasushi Fujii, Shinji Kawasaki, Hirotaka Kuwada +1 more | 2023-08-22 |
| 11578408 | Gas processing apparatus | Takashi Kamio | 2023-02-14 |