Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600490 | Silicon film forming method and substrate processing apparatus | Mitsuhiro Okada, Tatsuya MIYAHARA | 2023-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600490 | Silicon film forming method and substrate processing apparatus | Mitsuhiro Okada, Tatsuya MIYAHARA | 2023-03-07 |