Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837496 | Substrate processing apparatus and method of processing a substrate | Jong-Woo Sun, Sung Moon Park, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee +1 more | 2023-12-05 |
| 11817298 | Focus ring, chuck assembly for securing a substrate and plasma treatment apparatus having the same | Incheol Song, Hongmin Yoon, Jihyun Lim | 2023-11-14 |