Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817298 | Focus ring, chuck assembly for securing a substrate and plasma treatment apparatus having the same | Incheol Song, Masayuki Tomoyasu, Jihyun Lim | 2023-11-14 |
| 11573468 | Display substrate including a multi-layer structure of an organic layer and an inorganic layer, display device having the same, and method of manufacturing the display substrate | Seungbo Shim, Dasom Kang | 2023-02-07 |