Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817298 | Focus ring, chuck assembly for securing a substrate and plasma treatment apparatus having the same | Masayuki Tomoyasu, Hongmin Yoon, Jihyun Lim | 2023-11-14 |
IS
Incheol Song
Overall (2023): #414,994 of 537,848Top 80%
1
Patents 2023