Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817335 | Method and system for inspecting processing apparatus | Kenji Nagai | 2023-11-14 |
| 11735402 | Measurement method and measurement apparatus | Takashi Kubo, Yuhei Shimatsu | 2023-08-22 |
| 11604097 | Calibration method and calibration system | Hana Sasaki, Kaoru Inaba, Mitsuru Dohiwa, Takashi Niinuma, Hikaru Fujiwara | 2023-03-14 |