Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846997 | Rotating shaft mechanism and mobile terminal | Li Liao, Changliang Liao, Ding Zhong, Tao Huang | 2023-12-19 |
| 11817335 | Method and system for inspecting processing apparatus | Kippei Sugita | 2023-11-14 |
| 11710614 | Light interference system and substrate processing apparatus | Hideaki Nagasaki, Satoshi Suzuki | 2023-07-25 |
| 11668608 | Temperature measurement system and temperature measurement method | Tong Wu | 2023-06-06 |