Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676800 | Substrate processing apparatus and control method of substrate processing apparatus | Ikko Tanaka, Lifu LI, Atsushi TERASAWA | 2023-06-13 |
| 11557498 | Substrate processing method and substrate processing apparatus | Toru Takahashi, Nobuaki Shindo, Shigeru Yoneda | 2023-01-17 |