Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705309 | Substrate processing method | Yasutaka HAMA, Ryo Matsubara | 2023-07-18 |
| 11557498 | Substrate processing method and substrate processing apparatus | Toru Takahashi, Hiroshi Tsujimoto, Shigeru Yoneda | 2023-01-17 |