Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676800 | Substrate processing apparatus and control method of substrate processing apparatus | Lifu LI, Hiroshi Tsujimoto, Atsushi TERASAWA | 2023-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676800 | Substrate processing apparatus and control method of substrate processing apparatus | Lifu LI, Hiroshi Tsujimoto, Atsushi TERASAWA | 2023-06-13 |