Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11725284 | Substrate processing apparatus and substrate processing method | Chiaki Takeuchi | 2023-08-15 |
| 11567485 | Substrate processing system and method for monitoring process data | Nobutoshi TERASAWA, Noriaki Koyama, Tomonori Yamashita, Takazumi Tanaka, Takehiro KINOSHITA +1 more | 2023-01-31 |