Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852982 | Semiconductor manufacturing system | Chih-Yuan Yao, Hsiang-Lung TSOU | 2023-12-26 |
| 11784056 | Self-aligned double patterning | Kuan-Wei Huang, Jyu-Horng Shieh | 2023-10-10 |
| 11728209 | Lithography method to reduce spacing between interconnect wires in interconnect structure | Yi-Nien Su | 2023-08-15 |
| 11676821 | Self-aligned double patterning | Kuan-Wei Huang, Jyu-Horng Shieh | 2023-06-13 |
| 11555686 | Non-interdependent displacement measuring device for converting rotary motion to linear motion | — | 2023-01-17 |