Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854821 | Hard mask removal method | Che-Hao Tu, William Weilun Hong | 2023-12-26 |
| 11694889 | Chemical mechanical polishing cleaning system with temperature control for defect reduction | Ssutzu Chen, Gin-Chen Huang, Ya-Ting Tsai, Kei-Wei Chen | 2023-07-04 |