SC

Ssutzu Chen

TSMC: 1 patents #2,163 of 4,064Top 55%
Overall (2023): #247,551 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11694889 Chemical mechanical polishing cleaning system with temperature control for defect reduction Gin-Chen Huang, Ya-Ting Tsai, Ying-Tsung Chen, Kei-Wei Chen 2023-07-04