Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822231 | Method for removing particles from pellicle and photomask | Chih-Wei Wen, Chung-Hung Lin | 2023-11-21 |
| 11703754 | Particle prevention method in reticle pod | Chih-Wei Wen, Chung-Hung Lin | 2023-07-18 |