Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822231 | Method for removing particles from pellicle and photomask | Tzu Han Liu, Chung-Hung Lin | 2023-11-21 |
| 11809076 | Cleaning method, method for forming semiconductor structure and system thereof | Wu-Hung Ko, Chung-Hung Lin | 2023-11-07 |
| 11703752 | Method of accelerated hazing of mask assembly | Wu-Hung Ko, Kun-Lung Hsieh | 2023-07-18 |
| 11703754 | Particle prevention method in reticle pod | Tzu Han Liu, Chung-Hung Lin | 2023-07-18 |
| 11614684 | Photomask inspection method and apparatus thereof | Hsin-Fu Tseng, Chien-Lin Chen | 2023-03-28 |
| 11585832 | Probe card and probe module thereof | Chung-Yen Huang, Sheng-Feng Xu, Fuh-Chyun Tang, Chih-Hao Ho | 2023-02-21 |