Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822231 | Method for removing particles from pellicle and photomask | Tzu Han Liu, Chih-Wei Wen | 2023-11-21 |
| 11809076 | Cleaning method, method for forming semiconductor structure and system thereof | Wu-Hung Ko, Chih-Wei Wen | 2023-11-07 |
| 11703754 | Particle prevention method in reticle pod | Tzu Han Liu, Chih-Wei Wen | 2023-07-18 |