Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768431 | Method of fast surface particle and scratch detection for EUV mask backside | Chih-Cheng Chen, Ting-Hao Hsu, Hsin-Chang Lee | 2023-09-26 |
| 11614691 | High throughput and high position accurate method for particle inspection of mask pods | Shih-Jui Huang, Ting-Hao Hsu, Hsin-Chang Lee | 2023-03-28 |