Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11614691 | High throughput and high position accurate method for particle inspection of mask pods | ShinAn KU, Ting-Hao Hsu, Hsin-Chang Lee | 2023-03-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11614691 | High throughput and high position accurate method for particle inspection of mask pods | ShinAn KU, Ting-Hao Hsu, Hsin-Chang Lee | 2023-03-28 |