Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810816 | Chemical mechanical polishing topography reset and control on interconnect metal lines | Ming-Han Lee | 2023-11-07 |
| 11742239 | Methods of performing chemical-mechanical polishing process in semiconductor devices | Ming-Han Lee, Shau-Lin Shue | 2023-08-29 |
| 11545389 | Titanium-containing diffusion barrier for CMP removal rate enhancement and contamination reduction | Ming-Han Lee, Shau-Lin Shue | 2023-01-03 |