SL

Sheng-Hsun Lu

TSMC: 1 patents #2,163 of 4,064Top 55%
Overall (2023): #256,102 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11814731 Semiconductor tool having controllable ambient environment processing zones Chiao-Chun Hsu, Chih-Ming Chen, Chung-Yi Yu 2023-11-14