Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832520 | Voltage breakdown uniformity in piezoelectric structure for piezoelectric devices | Chih-Ming Chen, Chung-Yi Yu | 2023-11-28 |
| 11814731 | Semiconductor tool having controllable ambient environment processing zones | Chih-Ming Chen, Chung-Yi Yu, Sheng-Hsun Lu | 2023-11-14 |