SS

Shau-Lin Shue

TSMC: 26 patents #55 of 4,064Top 2%
Overall (2023): #1,110 of 537,848Top 1%
26
Patents 2023

Issued Patents 2023

Showing 26–26 of 26 patents

Patent #TitleCo-InventorsDate
11545389 Titanium-containing diffusion barrier for CMP removal rate enhancement and contamination reduction Shih-Kang Fu, Ming-Han Lee 2023-01-03