Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11767336 | Organometallic cluster photoresists for EUV lithography | Hsu-Kai Chang, Chi-Ming Yang, Jui-Hsiung LIU, Hsin-Yi Wu | 2023-09-26 |
| 11579531 | Organometallic cluster photoresists for EUV lithography | Hsu-Kai Chang, Chi-Ming Yang, Jui-Hsiung LIU, Hsin-Yi Wu | 2023-02-14 |