Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11816411 | Method and system for semiconductor wafer defect review | Chun-Wen Wang, Meng Ku Chi, Yan Chen, Jun Liu | 2023-11-14 |
| 11764094 | Semiconductor processing tool and methods of operation | Kai-Lin Chuang, Sheng-Wen Huang, Yan Chen, Jun Liu | 2023-09-19 |
| 11749571 | System and method for high speed inspection of semiconductor substrates | Sheng-He Huang, Shiue-Ming GUO, Hsuan-Chia KAO, Yan Chen, Sheng-Ching Kao +1 more | 2023-09-05 |