Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809084 | Radiation source supply system for lithographic tools | Yueh-Lin Yang | 2023-11-07 |
| 11703761 | Temperature controlling apparatus | Wei Chang Cheng | 2023-07-18 |
| 11687012 | Reduce mask defect impact by contamination decompose | Po-Ming SHIH | 2023-06-27 |
| 11675264 | Reticle cleaning system | Wei Chang Cheng | 2023-06-13 |
| 11599026 | Dispensing nozzle design and dispensing method thereof | Wei Chang Cheng | 2023-03-07 |
| 11579539 | Method and apparatus for improving critical dimension variation | Ming-Hsun LIN, Yu-Hsiang Ho, Jhun Hua Chen, Teng Kuei Chuang | 2023-02-14 |
| 11562898 | Cleaning method and apparatus | Min-Cheng Wu | 2023-01-24 |
| 11561482 | Methods and apparatus for reducing hydrogen permeation from lithographic tool | Po-Ming SHIH | 2023-01-24 |
| 11550233 | Lithography system and operation method thereof | Min-Cheng Wu | 2023-01-10 |