Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852980 | Techniques for correction of aberrations | Ching-Ju HUANG | 2023-12-26 |
| 11562898 | Cleaning method and apparatus | Chi-Hung Liao | 2023-01-24 |
| 11550233 | Lithography system and operation method thereof | Chi-Hung Liao | 2023-01-10 |