Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687012 | Reduce mask defect impact by contamination decompose | Chi-Hung Liao | 2023-06-27 |
| 11561482 | Methods and apparatus for reducing hydrogen permeation from lithographic tool | Chi-Hung Liao | 2023-01-24 |