Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854910 | Power rails for stacked semiconductor device | Keh-Jeng Chang, Chan-Lon Yang | 2023-12-26 |
| 11830931 | Transistor spacer structures | — | 2023-11-28 |
| 11830928 | Inner spacer formation in multi-gate transistors | Han-Yu Lin, Tze-Chung Lin, Fang-Wei Lee, Fo-Ju Lin, Li-Te Lin +1 more | 2023-11-28 |
| 11791397 | Field effect transistor with negative capacitance dielectric structures | Keh-Jeng Chang, Chan-Lon Yang | 2023-10-17 |
| 11769818 | Field effect transistors with negative capacitance layers | Chan-Lon Yang, Keh-Jeng Chang | 2023-09-26 |
| 11707803 | Apparatus and method for directional etch with micron zone beam and angle control | Li-Te Lin, Pinyen Lin | 2023-07-25 |
| 11605728 | Semiconductor device structure with inner spacer layer | Han-Yu Lin, Fang-Wei Lee, Tze-Chung Lin, Li-Te Lin, Pinyen Lin | 2023-03-14 |
| 11592749 | Laser interference fringe control for higher EUV light source and EUV throughput | Keh-Jeng Chang, Chan-Lon Yang | 2023-02-28 |
| 11594616 | Field effect transistor with negative capacitance dielectric structures | Keh-Jeng Chang, Chan-Lon Yang | 2023-02-28 |