Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685993 | Method of cleaning reaction tube, method of manufacturing semiconductor device, and substrate processing apparatus | Toru Nakada, Hiroyuki Kimura, Toru Segawa | 2023-06-27 |
| 11633753 | Nozzle installation jig | Yoshitaka Abe, Nobuhito Shima, Hiromi Okada, Mamoru Ohishi | 2023-04-25 |
| D982537 | Separator of substrate processing apparatus | Seiyo Nakashima, Satoru Murata | 2023-04-04 |
| D981972 | Adiabatic plate for substrate processing appratus | Seiyo Nakashima, Satoru Murata | 2023-03-28 |