Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D982537 | Separator of substrate processing apparatus | Shinya Morita, Satoru Murata | 2023-04-04 |
| D981972 | Adiabatic plate for substrate processing appratus | Shinya Morita, Satoru Murata | 2023-03-28 |