Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D986826 | Reaction tube | — | 2023-05-23 |
| D983151 | Exhaust liner for reaction tube | — | 2023-04-11 |
| D982537 | Separator of substrate processing apparatus | Shinya Morita, Seiyo Nakashima | 2023-04-04 |
| D981972 | Adiabatic plate for substrate processing appratus | Shinya Morita, Seiyo Nakashima | 2023-03-28 |