| 11807518 |
Multi-die integrated circuit package |
Renata Melamud Berger, Ginel C. Hill, Paul M. Hagelin, Aaron Partridge, Joseph C. Doll +1 more |
2023-11-07 |
| 11770112 |
MEMS resonator with co-located temperature sensor |
Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz |
2023-09-26 |
| 11764751 |
Temperature stable MEMS resonator |
Paul M. Hagelin |
2023-09-19 |
| 11747229 |
Frequency-modulating sensor array |
Paul M. Hagelin, Lev Goncharov |
2023-09-05 |
| 11731869 |
MEMS with small-molecule barricade |
Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge |
2023-08-22 |
| 11724934 |
MEMS resonator |
Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll |
2023-08-15 |
| 11718518 |
MEMS with small-molecule barricade |
Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill, Aaron Partridge |
2023-08-08 |
| 11677379 |
Microelectromechanical resonator |
Joseph C. Doll, Nicholas Miller, Paul M. Hagelin, Ginel C. Hill |
2023-06-13 |
| 11646698 |
Temperature-reporting oscillator |
Sassan Tabatabaei, Kamran Souri, Saleh Heidary Shalmany |
2023-05-09 |
| 11618675 |
MEMS cavity with non-contaminating seal |
Michael Julian Daneman, Paul M. Hagelin |
2023-04-04 |
| 11609136 |
Frequency-modulating sensor array |
Paul M. Hagelin, Lev Goncharov |
2023-03-21 |
| 11584642 |
MEMS resonator |
Nicholas Miller, Paul M. Hagelin, Ginel C. Hill, Joseph C. Doll |
2023-02-21 |