Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699612 | Substrate fixing device, electrostatic chuck and electrostatic chuck manufacturing method | Keiichi Takemoto, Yoichi Harayama, Hiroyuki Asakawa | 2023-07-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699612 | Substrate fixing device, electrostatic chuck and electrostatic chuck manufacturing method | Keiichi Takemoto, Yoichi Harayama, Hiroyuki Asakawa | 2023-07-11 |