Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830752 | Substrate fixing device, electrostatic chuck, and method of manufacturing electrostatic chuck | Yoichi Harayama | 2023-11-28 |
| 11699612 | Substrate fixing device, electrostatic chuck and electrostatic chuck manufacturing method | Yoichi Harayama, Hiroyuki Asakawa, Takahiro Rokugawa | 2023-07-11 |
| 11631598 | Substrate fixing device | Nobuyuki Iijima, Hiroyuki Asakawa, Yoichi Harayama | 2023-04-18 |