Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699612 | Substrate fixing device, electrostatic chuck and electrostatic chuck manufacturing method | Keiichi Takemoto, Yoichi Harayama, Takahiro Rokugawa | 2023-07-11 |
| 11631598 | Substrate fixing device | Nobuyuki Iijima, Keiichi Takemoto, Yoichi Harayama | 2023-04-18 |