Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827979 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Keigo NISHIDA, Takashi Ozaki | 2023-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827979 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Keigo NISHIDA, Takashi Ozaki | 2023-11-28 |