Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827979 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenichi Ishiguro, Takashi Ozaki | 2023-11-28 |
| 11594412 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Ozaki, Atsushi Hirano | 2023-02-28 |