Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827979 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Keigo NISHIDA, Kenichi Ishiguro | 2023-11-28 |
| 11735442 | Method of operating substrate processing apparatus, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2023-08-22 |
| 11594412 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Keigo NISHIDA, Atsushi Hirano | 2023-02-28 |