Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11845113 | Unit for recycling treating liquid of substrate and apparatus for treating substrate with the unit | Byung Sun BANG, Tae Ho KANG, Jong Won Moon | 2023-12-19 |
| 11798822 | Support unit, substrate treating apparatus including the same, and substrate treating method | Daehun Kim, Kangseop Yun | 2023-10-24 |
| 11765793 | Substrate treating apparatus | Muhyeon Lee, Gui Su PARK, Byungsun Bang, Jungbong Choi, Youngil Lee +3 more | 2023-09-19 |