Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11794220 | Fluid supply unit and substrate treating apparatus having the same | Inhwang PARK, Young-Hun Lee, Youngseop Choi, Seung Hoon Oh, Jonghyeon Woo +1 more | 2023-10-24 |
| 11765793 | Substrate treating apparatus | Muhyeon Lee, Byungsun Bang, Jungbong Choi, Youngil Lee, Kangseop Yun +3 more | 2023-09-19 |
| 11721575 | Substrate support unit and substrate treating apparatus having the same | Inhwang PARK, Young-Hun Lee, Youngseop Choi, Seung Hoon Oh, Jonghyeon Woo +1 more | 2023-08-08 |
| 11594421 | Substrate treating apparatus and substrate treating method | Youngil Lee, Jungbong Choi, Seungho Lee, Gil Hun Song, Seung Hoon Oh +1 more | 2023-02-28 |