Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11794220 | Fluid supply unit and substrate treating apparatus having the same | Gui Su PARK, Young-Hun Lee, Youngseop Choi, Seung Hoon Oh, Jonghyeon Woo +1 more | 2023-10-24 |
| 11721575 | Substrate support unit and substrate treating apparatus having the same | Gui Su PARK, Young-Hun Lee, Youngseop Choi, Seung Hoon Oh, Jonghyeon Woo +1 more | 2023-08-08 |