Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804386 | Transfer unit, and apparatus and method for treating substrate | Jae-Myoung Lee | 2023-10-31 |
| 11794220 | Fluid supply unit and substrate treating apparatus having the same | Inhwang PARK, Gui Su PARK, Youngseop Choi, Seung Hoon Oh, Jonghyeon Woo +1 more | 2023-10-24 |
| 11721575 | Substrate support unit and substrate treating apparatus having the same | Inhwang PARK, Gui Su PARK, Youngseop Choi, Seung Hoon Oh, Jonghyeon Woo +1 more | 2023-08-08 |