Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798822 | Support unit, substrate treating apparatus including the same, and substrate treating method | Ye Jin Choi, Daehun Kim | 2023-10-24 |
| 11765793 | Substrate treating apparatus | Muhyeon Lee, Gui Su PARK, Byungsun Bang, Jungbong Choi, Youngil Lee +3 more | 2023-09-19 |