Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798823 | Light irradiation type thermal process apparatus using a gas ring | Hiroshi Miyake, Akitsugu Ueda | 2023-10-24 |
| 11764100 | Heat treatment susceptor and heat treatment apparatus | — | 2023-09-19 |
| 11574824 | Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof | Takayuki Aoyama, Shinichi Kato, Hikaru Kawarazaki, Masashi Furukawa, Hideaki Tanimura +1 more | 2023-02-07 |