Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798823 | Light irradiation type thermal process apparatus using a gas ring | Hiroshi Miyake, Kazuhiko Fuse | 2023-10-24 |
| 11621178 | Light irradiation type heat treatment apparatus including oxygen analyzer and heat treatment method thereof | Takayuki Aoyama, Mao Omori, Kazunori AMAGO | 2023-04-04 |
| 11574824 | Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof | Takayuki Aoyama, Shinichi Kato, Kazuhiko Fuse, Hikaru Kawarazaki, Masashi Furukawa +1 more | 2023-02-07 |